← Zirconium & Hafnium Chlorides
Hafnium Tetrachloride
Hafnium tetrachloride is a hafnium chloride intermediate used in hafnium compound and precursor preparation. The reported elemental results on this page help identify the material for technical review; they do not by themselves establish a total-purity assay.
SAMPLE REQUESTClick to request a product sampleProduct Parameters / Technical Specifications
Specification
- Appearance
- Light yellow powder
Batch Test Results
| Zr | Ni | Al | Ca | Si | Cr | Fe |
|---|---|---|---|---|---|---|
| 0.11% | 0.0006% | 0.0003% | 0.0004% | 0.0016% | 0.0003% | 0.0041% |
Material Selection
- Agree the required assay basis and impurity specification before comparing grades.
- Review packaging and the applicable safety data sheet with the receiving facility; this chloride is moisture-sensitive.
Applications
- ALD precursors
- CVD precursors