← Zirconium & Hafnium Chlorides
Electronic Grade Hafnium Tetrachloride
Electronic grade hafnium tetrachloride is a hafnium chloride material for evaluation in thin-film precursor supply chains. Compare zirconium and other impurity limits with the requirements of the intended deposition or synthesis process.
SAMPLE REQUESTClick to discuss your requirementsProduct Parameters / Technical Specifications
Specification
- Appearance
- Light yellow powder
Trace Element Analysis
| Grade I - Zr | Grade II - Zr | Grade III - Zr |
|---|---|---|
| ≤ 10 ppm | ≤ 20 ppm | ≤ 50 ppm |
| Al | Ca | Cu | Fe | K | Mg | Ti | Si |
|---|---|---|---|---|---|---|---|
| ≤ 5 ppm | ≤ 10 ppm | ≤ 5 ppm | ≤ 10 ppm | ≤ 20 ppm | ≤ 10 ppm | ≤ 5 ppm | ≤ 5 ppm |
| Co | Mo | Nb | V | Zn | Mn | ||
| ≤ 1 ppm | ≤ 1 ppm | ≤ 1 ppm | ≤ 1 ppm | ≤ 1 ppm | ≤ 1 ppm |
Material Selection
- Request the required impurity profile and assay basis rather than relying only on the grade designation.
- Confirm source preparation, container compatibility and process qualification with the receiving team.